On the impact of interfacial SiOx-layer on the passivation properties of PECVD synthesized aluminum oxide
作者:
Abdelazize Laades1,*, Hans-Peter Sperlich2, Mario Bhr1, Uta Stürzebecher1, Carlos A. Diaz Alvarez1, Markus Burkhardt1, Heike Angermann3, Michael Blech1, Alexander Lawerenz