| 题名 | Statistical measure for the sharpness of SEM images |
| 作者 | Nien-Fan Zhang ; Michael T. Postek, Jr. ; Robert D. Larrabee ; Andras E. Vladar ; William J. Keery ; Samuel N. Jones |
| 链接 | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=923911 |
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