题名 | Dielectric properties of Zr, ZrN, Zr3N4, and ZrO2 determined by quantitative analysis of electron energy loss spectra |
作者 | P. Prieto, F. Yubero, E. Elizalde and J. M. Sanz |
杂志 | J. Vac. Sci. Technol. A |
年|卷|期 | 14 (1996) |
页码 | 3181 |
链接 | http://scitation.aip.org/content/avs/journal/jvsta/14/6/10.1116/1.580210 |
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