| 题名 | Ion‐induced topography, depth resolution, and ion yield during secondary ion mass spectrometry depth profiling of a GaAs/AlGaAs superlattice: Effects of sample rotation |
| 作者 | Eun‐Hee Cirlin, John J. Vajo, Robert E. Doty and T. C. Hasenberg |
| 杂志 | J. Vac. Sci. Technol. A |
| 年|卷|期 | (1991) 9 |
| 页码 | 1395 |
| 链接 | http://scitation.aip.org/content/avs/journal/jvsta/9/3/10.1116/1.577634 |
| 欢迎光临 科研速递论坛 (http://www.expaper.cn/) | Powered by Discuz! X2.5 |