题名 | Quantification of secondary-ion-mass spectroscopy depth profiles using maximum entropy deconvolution with a sample independent response function |
作者 | M. G. Dowsett and D. P. Chu |
杂志 | J. Vac. Sci. Technol. B |
年|卷|期 | 16(1998) |
页码 | 377 |
链接 | http://scitation.aip.org/content/avs/journal/jvstb/16/1/10.1116/1.589814 |
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