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标题: Comparison of the sputter rates of oxide films relative to the sputter rate o... [打印本页]

作者: Anthea14 时间: 2013-11-5 23:48
标题: Comparison of the sputter rates of oxide films relative to the sputter rate o...

题名	Comparison of the sputter rates of oxide films relative to the sputter rate of SiO2
作者	D. R. Baer, M. H. Engelhard, A. S. Lea, P. Nachimuthu, T. C. Droubay, J. Kim, B. Lee, C. Mathews, R. L. Opila, L. V. Saraf, W. F. Stickle, R. M. Wallace and B. S. Wright
杂志	Journal of Vacuum Science & Technology A
年\|卷\|期	2010\|28
页码	1060
链接	http://scitation.aip.org/content/avs/journal/jvsta/28/5/10.1116/1.3456123

作者: jocktor 时间: 2013-11-5 23:48
http://dl.vmall.com/c08o19nl7e

作者: jocktor 时间: 2013-11-5 23:50
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