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标题: In situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced At... [打印本页]

作者: tookey0116 时间: 2017-4-5 14:06
标题: In situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced At...

题名	In situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
链接	http://pubs.acs.org/doi/abs/10.1021/acsami.7b00778

作者: markjackson 时间: 2017-4-5 14:06
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